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Keyword: semiconductor manufacturing
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Janneck, J.W.;
Naedele, M.:
Modeling a die bonder with Petri nets - a case study.
1998.
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Jeng, M.D.;
Xie, X.L.;
Chou, S.W.:
Modeling, qualitative-analysis, and performance evaluation of the etching area in an IC wafer fabrication system using Petri nets.
1998.
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Zhou, M.C.;
Jeng, M.D.:
Modeling, analysis, simulation, scheduling, and control of semiconductor manufacturing systems - a Petri net approach.
1998.
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