Keyword: wafer fabrication

• Yoon, H.J.; Lee, D.Y.:
  Real-time scheduling of wafer fabrication with multiple types. 1999.

• Jeng, M.D.; Xie, X.L.; Chou, S.W.:
  Modeling, qualitative-analysis, and performance evaluation of the etching area in an IC wafer fabrication system using Petri nets. 1998.

Back to the Petri Nets Bibliography